Fritz-Haber-Institut der Max-Planck-Gesellschaft  

Inorganic Chemistry – Electron Microscopy Group
  

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Electron Microscopy Group:
Thomas Lunkenbein
 
Research
Methods
Highlights
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Open Positions
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Equipment
Theory Support
Ernst Ruska
SpecsEx
 
Equipment:
JEOL JEM-ARM200F
  • Probe and image Cs corrector
  • cold field emission gun
  • acceleration voltages: 80, 200 kV
  • point resolution: 1.1 Å TEM
  • point resolution: 0.8 Å STEM
  • Energy Dispersive X-ray detector
  • Gatan Imaging Filter (Quantum)
  • Gatan UltraScan 4000 Camera
  • HAADF, ADF, ABF, BF
FEI Talos F200X
  • XFEG field emission gun
  • acceleration voltage: 200 kV
  • Information limit TEM: 1.2 Å
  • point resolution STEM: 1.6 Å
  • FEI Ceta 16M CMOS camera
  • BF, 2 DF, HAADF detectors
  • SuperX 4 SDD EDX detectors, 0.9 sr
  • EDX energy resolution: 130 eV
  • TEM & STEM tomography
FEI TITAN 80-300
  • Cs corrector
  • Field Emission Gun
  • acceleration voltages 80, 200, 300 kV
  • point resolution: 0.8 Å TEM
  • point resolution: 1.34 Å STEM
  • Energy Dispersive X-ray detector
  • Gatan Imaging Filter (Tridiem)
  • HAADF
Hitachi S4800
  • cold Field Emission Gun
  • acceleration voltages from 0.1 kV to 30 kV
  • max. resolution: 1.4 nm at 1 kV; 1.0 nm at 15 kV
  • Secondary Electron detector (upper/lower)
  • Back Scattered Electron detector (YAG)
  • Scanning Transmission Electron Microscopy detector
  • Energy Dispersive X-ray detector (Genesis 4000)
FEI FIB/SEM DualBeam Helios NanoLab G3 UC
    SEM
  • Schottky thermal field emitter
  • UC technology (monochromator) at low energies
  • Acceleration voltage: 0.35 - 30 kV
  • E-beam current: 0.8 pA up to 100 nA
  • 5x SE and BSE detectors
  • Retractable STEM detector
  • High performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE)
  • Max. electron beam resolution @ optimum WD and 15 kV: 0.6 nm
  • QuickLok ambient temperature airlock for vacuum transfer

  • FIB
  • Gallium ion source
  • Acceleration voltage: 0.5 - 30 kV
  • Ion beam current: 0.1 pA up to 65 nA
  • Ion beam resolution @ coincident point and 30 kV: 4.0 nm
  • GIS (Gas Injection System): C and Pt deposition
  • EasyLift™ In situ lift-out micromanipulator
FEI Quanta 200 FEG
  • hot Field Emission Gun
  • acceleration voltages from 0.5 kV to 30 kV
  • max. resolution: 1.4 nm
  • Secondary Electron detector
  • Back Scattered Electron detector (SSD)
  • Scanning Transmission Electron Microscopy detector
  • Energy Dispersive X-ray detector (Genesis 4000)
  • Cathodo Luminescence detector
  • in-situ SEM in gas atmoresphere
  • two heating stages (up to 1000°C and 1500°C)
  • mass flow controller (N2, O2, H2, CO, C2H4, H2O,
    NH3 …)
  • three imaging modes - high vacuum, low vacuum (0.1~2 mbar) and ESEM (up to 30 mbar)
  • gaseous SE and BSE detectors
XRF X-ray Florescence Spectrometer Pioneer S4 (Bruker)
  • Elemental quantification with/without Standards
  • 4 kW equipment performance
  • Rh – Target
 
Preparation

Equipment:
  • Ion beam etching device
  • PIPS 691 (2x)
  • RES 101
  • Fischione 1010
  • Grinding devices
  • Diamant saw (2x)
  • Dimple grinder (2x)
  • Ultra microtome PowerTome X
  • Zeiss optical microscope AxioTech
  • Melting device (Vulcan 2)
  • Sputter/Coater (Cressington)
  • Edwards Auto 306 coating device
  • Fischione plasm cleaner
  • Binder plasm cleaner

Methods:
  • Cross section
  • Plan view
  • Slope cutting
  • Ion beam etching
  • Sample melting (XRF)
 
STOE STADI P transmission diffractometer
  • Cu anode
  • Primary Ge(111) monochromator
  • Dectris MYTHEN 1K position sensitve microstrip solid-state detector
  • Auto sampler
 
Bruker D8 Advance II Bragg-Brentano Theta/Theta diffractometer
  • Cu anode
  • Ni filter
  • LynxEye position sensitve microstrip solid-state detector
 
Bruker D8 Advance Davinci Theta/Theta diffractometer
  • Parallel beam geometry
  • Cu anode
  • Ni filter
  • LynxEye position sensitve microstrip solid-state detector
  • Compact Eulerian cradle or motorized xyz sample stage
 
STOE Bragg-Brentano Theta/Theta diffractometer (in-situ setup)
  • Cu anode
  • Secondary graphite monochromator & scintillation detector
  • Alternatively: Ni filter & Dectris MYTHEN 1K position sensitve microstrip solid-state detector
  • Anton Paar XRK900 high-temperature diffraction chamber
  • Gas supply system with Bronkhorst mass flow controllers
  • Online gas analysis with Pfeiffer OmniStar quadrupole mass spectrometer
 
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